DEVELOPMENT OF THE PROCESS OF PRECISION FINISHING OF FUNCTIONAL SURFACES OF OPTICAL AND ELECTRONIC COMPONENTS MADE FROM SYNTHETIC MONOCORUNDUM (SAPPHIRE)

摘要

The paper describes the main technical requirements imposed on functional surfaces of monocorundum (sapphire) components for optical and electronic applications and reviews the state-of-the-art of precision finishing of such surfaces. The authors report the results of laboratory tests of a novel precision finishing method and tools which have been developed at V. N. Bakul Institute for Superhard Materials of the National Academy of Sciences of Ukraine and ensure the required characteristics of the above-mentioned components.