Superhard Coatings of the (Zr-Ti-Si)N and (Ti-Hf-Si)N Systems Produced by Vacuum-Arc Deposition from a Separated Flow

摘要

Multicomponent hard coatings based on nitrides of Si-doped transition metals have been produced by vacuum-arc deposition with the use of a RF generator and separation of an ion-plasma flux. Physico-mechanical and tribotechnical characteristics of coatings have been studied. The possibility of their use as efficient protective coatings has been shown.