Stoichiometry, phase composition, and properties of superhard nanostructured Ti-Hf-Si-N coatings obtained by deposition from high-frequency vacuum-arc discharge

摘要

Superhard nanostructured Ti-Hf-Si-N coatings (films) possessing high mechanical properties were obtained by deposition from high-frequency vacuum-arc discharge. The elemental and phase composition and morphology of the films were studied by a combination of methods including RBS, SIMS, GDMS, SEM-EDXS, XRD and nanoindentation techniques at various pressures and bias voltages applied to the coated samples. It is established that, as the average grain size in nc-(Ti,Hf)N (nanocrystalline) coatings decreases from 6. 7 to 5 nm and a-Si_3N_4 (amophous or quasi-amorphous phase) interlayers are formed between the nanograins, the nanohardness of coatings increases from 42. 7 to 48. 4-1. 6 GPa. However, the further grain refinement of nc-(Ti,Hf)N to 4. 0 nm leads to a slight decrease in the nanohardness. The stoichiometry of the coatings changes from (Ti_(25)-Hf_(12. 5)-Si_(12. 5))N_(50) to (Ti_(28)-Hf_(18)-Si_(9))N_(45), which is accompanied by variation of the lattice parameter of (Ti,Hf)N solid solution grains.