Superhard coatings of the (Zr-Ti-Si)N and (Ti-Hf-Si)N systems produced by vacuum-arc deposition from a separated flow

摘要

Multicomponent hard coatings based on nitrides of Si doped transition metals have been produced by vacuum–arc deposition with the use of a RF generator and separation of an ion–plasma flux. udPhysico-mechanical and tribotechnical characteristics of coatings have been studied. The possibility of udtheir use as efficient protective coatings has been shown.