Precision Aspherization of the Surface of Optical Elements by Ion-Beam Etching

摘要

Ion-beam methods are developed for forming supersmooth aspherical optical surfaces of polished fused quartz with a precision on the level of 3 nm relative to the standard deviation and 0.2-0.3 nm for the mean-square surface roughness in the range of spatial frequencies of 0.01-100 μm~(-1).