New type of BN nanoparticles and films prepared by synergetic deposition processes using laser and plasma: the nanostructures, properties and growth mechanisms

摘要

This paper reviews the discovery and developments of a new material, sp3-bonded 5H–BN, and some other related new nanomaterials such as hollow-cored nanoforms of BN and B/BN, which have been prepared by synergetic deposition processes using a radio frequency plasma and an excimer laser at 193 nm. The sp3-bonded 5H–BN is a new member to the old sp3-bonded couple of wurtzite and cubic BN. Regarding the growth mechanisms, the roles of plasma and laser, which have been investigated by the authors in the last decade, are reviewed and integrated to emphasize the synergetic effects. Excellent electron field emission and ultraviolet light emission at 225 nm have been found in the film and powder samples of sp3-bonded 5H–BN, respectively. Deep insights into the vapour growth mechanism of cubic boron nitride (cBN) with the help of laser and/or plasma have also been obtained.