STRUCTURAL INVESTIGATIONS OF FERROELECTRIC Pb(Zr,Ti)O3 THIN FILMS PREPARED BY SOL-GEL METHOD ON IrO2 ELECTRODES

摘要

The crystalline structure, the interlayer and the epitaxial growth stage of PZT/IrO: deposited by sol-gel method, were investigated using: X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM ) (in bright field (BFTEM) and in dark field (DFTEM)), in correlation with selected area electron diffraction (SAED), high resolution electron microscopy (HRTEM) and X-ray energy dispersive spectroscopy (EDS). On the IrO2 electrodes, preferential (110) orientation was obtained. The crystalline growth of PZT film depends on the initial state of surface al the initial moment and on the relationship between PZT and bottom electrode IrO2. In particular, the interlayer Ir3Ti, formed between PZT and lrO2 plays an important role in the epitaxial growth of PZT film.