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首页> 外文期刊>Journal of Micromechanics and Microengineering >Automated parallel microassembly for MEMS application
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Automated parallel microassembly for MEMS application

机译:用于MEMS应用的自动并行微装配

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摘要

This paper presents the automation of a parallel microassembly process for the construction of out-of-plane microstructures. Images from two vision systems were utilized to automate the grasping and the insertion of three microparts simultaneously. A modified microgripper design and guiding beams were introduced to minimize the possible shift of the micropart and their effectiveness was confirmed experimentally. Parallel microassembly experiments were conducted with success rates of 93% and 61% for the automatic grasping and insertion, respectively. Orientation shifting, experienced by the microparts during the fracture of the supporting tethers, is the suspected cause of failure.
机译:本文介绍了用于平面外微结构构建的并行微装配过程的自动化。来自两个视觉系统的图像被用来同时自动抓取和插入三个微零件。引入了改进的微夹钳设计和导向梁,以最大程度地减少微零件的移动,并通过实验证实了其有效性。进行平行微装配实验的自动抓取和插入成功率分别为93%和61%。在支撑系绳断裂期间,微零件经历的方向偏移是故障的可能原因。

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