Monolithically integrated glass microlens scanner using a thermal reflow process

摘要

A monolithically integrated glass microlens optical scanner is presented. A new wafer-level fabrication approach addresses the issue of microlens integration and alignment in conventional microlens integrated devices. A through-silicon plano-convex glass microlens has been fabricated on a silicon substrate prior to the formation of an integrated microlens actuator, realized through two thermal reflow processes at 850℃. A lateral comb drive is adapted to demonstrate the glass microlens scanner. The 800 μm diameter microlens was laterally shifted up to ±51.6 μm when an ac voltage of 28.5 V in amplitude was applied at a resonant frequency of 1.749 kHz at atmospheric pressure. The optical scanning angle of ±2.0° has been obtained with the fabricated device.