RF MEMS suspended band-stop resonator and filter for frequency and bandwidth continuous fine tuning

摘要

We firstly propose the concept of a frequency and bandwidth fine-tuning method using an RF MEMS-based suspended tunable band-stop resonator. We experimentally show the feasibility of the continuously tuned resonator, including a second-order filter, which consists of cascaded resonators to achieve center frequency and bandwidth fine tuning. The structure consists of a freestanding half-wavelength (λ/2) resonator connected to a large displacement comb actuator. The lateral movement of the λ/2 resonator over the main transmission line produces different electromagnetic decoupling values from the main transmission line. The decoupled energy leads to continuous center frequency and bandwidth tuning using the band-stop resonator circuit for fine-tuning applications. The freestanding λ/2 resonator plays the role of a variable capacitor as well as a decoupling resonator in the proposed structure. The fabricated tunable filter shows suitability for Ku-band wireless communication system applications with continuous reconfiguration.