We present a solution for a fourth-order, narrow-bandwidth filter comprising of a single silicon tuning fork resonator driven using one electrode only. Voltage controlled electrical spring tuning is employed to match the primary and secondary modes of the resonator to achieve filter response. A narrow bandwidth single resonator MEMS tuning fork filter is demonstrated with a center frequency of 1.2866 MHz, a 3 dB-bandwidth of 0.0085% and a 1.5 dB ripple.
展开▼
