Study of electrothermal V-beam actuators and latched mechanism for optical switch

摘要

We present new optical switch devices based on a bi-stable microelectromechanical structure driven by two sets of one-directional movable electrothermal V-beam actuators. In conjunction with the movement translation link structure, or T-shaped end of the switch body, and buckle springs, the first V-beam actuator set can drive the in-plane moving reflective shutter from one rest position to the second stable position, while the second V-beam actuator set is able to drive the reflective shutter back to the original rest position. The transmission state of the optical switch device could be one of these bi-stable positions, and the switching state will be the counter position. Thus, the bi-directional motion capability is realized by using a pair of V-beam actuator sets with opposite directions of motion. We have optimized the design of V-beam actuators according to the application requirements. The preliminary results prove the application feasibility.