Characterization of Bi-Stable Micromechanism Based on Buckle Spring and Electrothermal V-Beam Actuators

摘要

We present a novel bi-stable microelectromechanical structure driven by a pair of one-directional movable electrothermal V-beam actuators for applications need latch functions, like optical switch and relay. In conjunction with the T-shaped end and buckle spring, the first V-beam actuator set can drive the in-plane moving reflective mirror from transmission state to switching state, while the second V-beam actuator set is able to return the reflective mirror from position of switching state to position of transmission state. Thus the bi-directional motion capability is realized by using a pair of V-beam actuator sets with opposite moving direction. The preliminary results prove its application feasibility.