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首页> 外文期刊>Journal of Micromechanics and Microengineering >A miniature low cost and high reliability 1 x 2 mechanical optical switch
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A miniature low cost and high reliability 1 x 2 mechanical optical switch

机译:微型低成本高可靠性1 x 2机械光开关

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This paper presents the design, fabrication and tests of a miniature 1 x 2 mechanical type optical switch, whose components are fabricated by precision machining and MEMS technologies. The packaging and alignment are integral processes utilizing the CCD image processing technique and PZT-stages controlled technique in association with the optimization software enabling the fiber-to-fiber alignment to low optical loss requirement. Optical fibers in use have the following specifications: single-mode fiber (SMF) outer diameter 125 Am, core diameter 9 Am, zero degree of the fiber tip angle and non-anti-reflection coating. The initial gap of the input and output fibers is 10 Am. First, we produced a fiber holder and a V-groove by MEMS technology and used a relay as the input fiber switching actuator. Through proper mechanism design, the fiber positioning error can be reduced to below 0.1 mu m. After the optimized alignment process, the results presented that the insertion loss could be controlled to ch1: 0.8 dB, ch2: 1.4 dB at a switching time of 5 ms. The reliability tests demonstrated that the variation of the insertion losses are ch1: 0.04 dB, ch2: 0.02 dB after 10000 cycle times, and ch1: 0.024 dB, ch2: 0.006 dB throughout 100 switch times after 1000 000 cycle times. The developed 1 x 2 optical switch largely reduces the physical size to 1/2-1/3 in comparison with traditional mechanical optical switches, and the cost is only about 1/10-1/20 of the MEMS type optical switches. The advantages of this innovative optical switch are: small size (only about 20 x 16 x 7.5 mm(3)), low cost (only about US
机译:本文介绍了一个微型1 x 2机械式光学开关的设计,制造和测试,其组件是通过精密加工和MEMS技术制造的。包装和对准是利用CCD图像处理技术和PZT阶段控制技术与优化软件相结合的整体过程,该优化软件使光纤到光纤的对准达到较低的光损耗要求。使用的光纤具有以下规格:单模光纤(SMF)外径为125 Am,纤芯直径为9 Am,光纤尖端角度为零,并且具有抗反射涂层。输入和输出光纤的初始间隙为10 Am。首先,我们通过MEMS技术生产了光纤支架和V型槽,并使用了继电器作为输入光纤开关执行器。通过适当的机构设计,可以将光纤定位误差降低到0.1微米以下。经过优化的对准过程,结果表明,在5 ms的切换时间下,插入损耗可以控制为ch1:0.8 dB,ch2:1.4 dB。可靠性测试表明,插入损耗的变化在10000次循环后为ch1:0.04 dB,ch2:0.02 dB,在100000次循环后的100次开关时间内ch1:0.024 dB,ch2:0.006 dB。与传统的机械光开关相比,已开发的1 x 2光开关将物理尺寸大大减小到1 / 2-1 / 3,并且成本仅为MEMS型光开关的约1 / 10-1 / 20。这种创新的光学开关的优点是:体积小(仅约20 x 16 x 7.5毫米(3)),成本低(仅约美制)

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