A hybrid electrostatic micro-harvester incorporating in-plane overlap and gap closing mechanisms

摘要

This paper presents a novel design, fabrication and characterization of an electrostatic micro-energy scavenger, converting the environmental vibration. The design incorporates MEMS comb-drive in-plane overlap as well as in-plane gap closing topologies into one hybrid structure. The device geometry and dimensions are optimized to maximize the energy harvesting efficiency. UV-LIGA process combined with nickel electroplating is utilized to fabricate the devices. A shaker platform in conjunction with a calibrated accelerometer is used to measure the harvested ac voltage with varying acceleration. Peak to peak value of 0.800 V is generated under external acceleration magnitude of 78.4 m s(-2) at a vibration frequency of 1.90 kHz. Power predictions based on electromechanical and finite element method (FEM) simulations agree with the measured data.