One of the biomedical applications for silicon-based micromachined devices is that of neural probe for neurophysioloical experiments and neural engineering. A number of studies have been carried out [1-4] and it has been shown that CMOS circuitry such as preamplifiers and multiplexers can be monolithically integrated with the probe for additional benefits [5]. The semiconductor-based neural probes contain arrays of precisely defined microelectrodes designed to interface with neurons or nerve fibers.
展开▼
