In-situ TEM straining experiments of Al films on polyimide using a novel FIB design for specimen preparation

摘要

In-situ transmission electron microscopy (TEM) straining experiments are tedious to perform but give invaluable insight into the deformation processes of materials. With the current interest in mechanical size-effects of nanocrystalline materials and thin metallic films, in-situ tensile testing in the TEM is the key method for identifying underlying deformation mechanisms. In-situ TEM experiments can be significantly simplified using well-designed specimens. The advantages of a novel focussed ion beam design and first in-situ straining results of 500-nm thick single-crystalline Al films on polyimide are reported and compared to conventionally prepared Al films on polyimide.