Formation of nanostructured TiAlN, TiCrN, and TiSiN coatings using reactive magnetron sputtering

摘要

The effect of the additive of the third element (Al, Cr or Si) to titanium nitride coatings deposited using reactive magnetron sputtering on their hardness and tribological behavior is studied. The regularities of the formation of the coatings, as well as the influence of conditions of deposition on their final composition and characteristics, are considered; recommendations on producing the TiN-based coatings with the enhanced performance characteristics are given. The tribotests of these coatings are performed and discussed. When using the aluminum additive and keeping optimum conditions of deposition, the effect of enhancing the performance characteristics of the TiN coating is observed.