Effect of Vacuum Annealing on Tribological Behavior of Nanosized Diamond-Like Carbon Coatings Produced by Pulse Vacuum-Arc Method

摘要

Results of tribotests of nanosized carbon coatings formed on silicon surfaces by the pulse vacuumarc method at various orientations of substrates with regard to a carbon plasma flow are presented; the tribotests were carried out for as-deposited coatings and coatings annealed in vacuum at 600 and 800℃. It has been shown that, among as-deposited coatings, the carbon coating deposited on a substrate perpendicular to the axis of the plasma flow has the highest wear resistance. An increase in the wear resistance of diamond-like carbon coatings after annealing at 600℃ has been found.