The effects of N2 pressure and negative bias voltage on the hardness of TiAlN coatings were explored, which were deposited by a cathodic vacuum arc technique. The hardness of TiAIN coating and the relationship between hardness and tribology properties were investigated. It can be concluded that hardness was mainly determined by the weakest factor, according to the concept of hardness, among the three ones which were the bonding energy between Ti/Al and N atoms, preferential orientation, and grain refinement. The higher hardness coatings preferred abrasive wear along with high friction coefficient and wear rate, while coatings with lower hardness attaching debris readily resulted in adhesive wear with low friction coefficient and wear.%采用真空阴极电弧制备了TiAlN涂层,研究了N2气压和基体负偏压对涂层硬度的影响规律,分析了涂层的致硬机理,探讨了硬度对摩擦学性能的影响.结果表明,N2降低入射离子能量,降低增原子扩散,导致晶粒细化；基体负偏压增大入射离子能量,导致涂层致密化并依次出现(200)、(111)、(220)、(200)择优取向.TiAlN涂层的硬度受Ti、Al、N原子间键能,生长面择优取向及晶粒显微组织的影响.其中最薄弱因素起决定作用.摩擦学性能研究表明,高硬度TiAlN涂层易形成磨粒磨损,摩擦系数和磨损率高；低硬度TiAlN涂层易发生粘着磨损,摩擦系数和磨损率低.
展开▼
