LWIR Strained-Layer Superlattice Materials and Devices at Teledyne Imaging Sensors

摘要

Strained-layer superlattices (SLS) based on type II InAs/Ga(In)Sb materials are a rapidly maturing technology and are theoretically predicted to exceed the dark-current performance of state-of-the-art HgCdTe. A substantial effort is underway at Teledyne Imaging Sensors in the development of SLS materials for infrared focal-plane arrays. In this paper, we describe state-of-the-art materials, device research and characterization, along with testing results for long-wavelength infrared SLS devices based on double-heterostructure and p~(+)-B-n architectures, having n-on-p and p-on-n polarities, respectively. Detector materials exhibited excellent morphological and crystalline characteristics, and electro-optical characterization demonstrated performance comparable to the state of the art.