Fabrication and characteristics of PZT thick films on Pt/Ti foil substrates for piezoelectric vibrators

摘要

Crack free perovskite PbZro.53Tio.47O{sub}3 (PZT (53/ 47)) thick films up to 30 μm were prepared on flexible platinum-coated titanium foil substrates (Pt/Ti) by a metal organic decomposition (MOD) process. The dielectric, ferroelectric and piezoelectric properties of the films were examined and discussed. A well-saturated hysteresis loop of the thick film was present in almost rectangular shape (Pr= 35 μC/cm{sup}2; Ec=32 kV/cm). The efficient piezoelectric coefficient d{sub}(33, f) of the thick film is about 448 (1 kHz). PZT piezoelectric vibrators were made in bimorph mode. The displacements of the vibrators were investigated as the functions of the applied electric field and the substrate thickness. Under the same condition, the vibrator made from the thinnest Pt/Ti substrate gives the largest displacement.