XPS spectra of thin CN{sub}x films prepared by chemical vapor deposition

摘要

Carbon nitride (CNA) thin films with an N/C ratio of 0.605:0.522 have been synthesized using different sources as a ksilol. CCl4, N{sub}2 and NH3 by PECVD (plasma enhanced chemical vapor deposition) and hot filament-CVD reactors. X-rayphotoelectron spectroscopy (XPS) analyses, which give C{sub}1s peaks with a maximum at 285.7 eV and 287 eV, typical for C-N bonds and sp{sup}2 hybridization and C=N bonds and sp{sup}3 hybridization, respectively. The observed and N{sub}1s peaks with amaximum at about 399 eV suggest the existence of different C N bonds and polycrystallite structure in the amorphous carbide matrix. The concentration of the different CN bonds varies, depending on the deposition technique.