METHOD OF PREPARING POLYMER INSULATOR THIN FILM USING INITIATED CHEMICAL VAPOR DEPOSITION AND POLYMER INSULATOR THIN FILM PREPARED BY THE METHOD

摘要

The present invention relates to a technique for manufacturing a diacrylate-based polymer insulating film using an initiator chemical vapor deposition method (initiated chemical vapor deposition; iCVD), a chemical vapor deposition method using an initiator (initiated Synthesizing a diacrylate-based polymer using chemical vapor deposition (iCVD), using the synthesized cross-linking polymer as a blocking dielectric layer, and over the blocking dielectric layer And forming a polymer polymer through an iCVD process and depositing the polymer polymer on the blocking dielectric layer to form a polymer insulating layer exhibiting memory characteristics.