Structural and compositional characterization of 6H-SiC implanted with N{sup}+ and Al{Sup}+ ions using optical methods

摘要

Using plane-view and cross-sectional Raman spectroscopy, polarized infra-red spectroscopy and photothermal spectroscopy the structure, composition and internal stress of 6H-SiC crystal implanted sequentially with N{sup}+ and Al{sup}+ ions to forma (SiC){sub}(1-x)- (AlN ){sub}x solid solution were studied non-destructively and self-consistently. The optimum implantation temperature for the synthesis of a (SiC){sub}(1-x)(AlN){sub}x solid solution with a 6H structure was found to be 600℃.