Nucleation and growth of diamond films on aluminum nitride by hot filament chemical vapor deposition

Wang W.L.

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Nucleation and growth of diamond films on aluminum nitride by hot filament chemical vapor deposition

机译：热丝化学气相沉积法在氮化铝上金刚石膜的成核和生长

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来源
《Diamond and Related Materials》 |2000年第10期|共4页
作者
Wang W.L.;
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原文格式 PDF
正文语种 eng
中图分类电热工业、高温制品工业;第Ⅳ族非金属元素及其无机化合物;人造宝石、合成宝石的生产;
关键词
Aluminum nitride films; Diamond films; Hot filament chemical vapor deposition; Nucleation;

机译：氮化铝膜;金刚石膜;热丝化学气相沉积;成核;

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专利

1. Nucleation and growth of diamond films on aluminum nitride by hot filament chemical vapor deposition [J] . Wang W.L. Diamond and Related Materials . 2000,第9a10SepaaOcta期

机译：热丝化学气相沉积法在氮化铝上金刚石膜的成核和生长
2. Fundamentals towards large area synthesis of multifunctional Ultrananocrystalline diamond films via large area hot filament chemical vapor deposition bias enhanced nucleation/bias enhanced growth for fabrication of broad range of multifunctional devices [J] . Alcantar-Pena Jesus J., de Obaldia Elida, Montes-Gutierrez Jorge, Diamond and Related Materials . 2017,第期

机译：通过大面积热灯丝化学气相沉积偏置的大面积覆盖金刚石薄膜的基本面，增强了成核/偏置，增强了生产广泛多功能装置的增长
3. Effects of cobalt and cobalt oxide buffer layers on nucleation and growth of hot filament chemical vapor deposition diamond films on silicon (100) [J] . Mushtaq Ahmad Dar, Hatem Abuhimd, Iftikhar Ahmad, The Korean journal of chemical engineering . 2014,第7期

机译：钴和钴氧化物缓冲层对硅上热丝化学气相沉积金刚石薄膜成核和生长的影响（100）
4. Structural Study and Mechanisms of Nucleation and Growth of Diamond Crystal Grown on Scratched Si(100) substrate by hot Filament Chemical Vapor Deposition Method [C] . M.Shamsuzoha, Ashok Kumar TMS annual meeting . 1999

机译：热丝化学气相沉积法在划痕的Si（100）衬底上生长的金刚石晶体的成核与生长机理研究
5. Evaluation of surface modification technologies for growing diamond films in the hot filament chemical vapor deposition system [D] . Galeev, Mikhail Tagirovich 1999

机译：热丝化学气相沉积系统中用于生长金刚石膜的表面改性技术的评估
6. Doping of vanadium to nanocrystalline diamond films by hot filament chemical vapor deposition [O] . Yaozhong Zhang, Liying Zhang, Jiang Zhao, 2012

机译：通过热丝化学气相沉积将钒掺杂到纳米晶金刚石膜中
7. High‐Rate Growth of Single‐Crystalline Diamond (100) Films by Hot‐Filament Chemical Vapor Deposition with Tantalum Filaments at 3000 °C [O] . Taira Tabakoya, Shohei Kanada, Yusuke Wakui, 2019

机译：通过3000°C的钽长丝的热灯丝化学气相沉积单晶金刚石（100）膜的高速率生长
8. Growth of diamond films on silicon via hot filament chemical vapor deposition [R] . Cisneros, M. A. , Trejo, M. F. 1998

机译：通过热丝化学气相沉积在硅上生长金刚石薄膜

Nucleation and growth of diamond films on aluminum nitride by hot filament chemical vapor deposition

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