Study on tribological property of CrCN coating based on magnetron sputtering plating technique

摘要

The influence of carbon doping on tribological properties of CrCN coating was studied through preparation of coatings deposited on single crystal silicon and M2 high-speed steel (HSS) substrate using closed-field unbalanced magnetron sputtering ion plating technique. The friction coefficients were measured by pin-on-disc set-up and the wear traces of the coatings were observed by optical microscope. The microstructure and bond states of the coatings were characterized by atomic force microscope (AFM), transmission electron microscopy (TEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The results show that the friction coefficient of coating decreases from 0.75 to 0.38, the micro-hardness increases from 1930 HV to 2300 HV, and the specific wear ratio of the coatings decreases from 8.351 × 10~(-15) m ~3/Nm to 3.859 × 10~(-15) m~3/Nm with the increasing of carbon target current (I_C) from 0 A to 1.5 A. The grain size and the roughness of the coatings both decrease with the increasing of carbon target current, at the same time the coatings transform from crystalline state to amorphous state.