Spectral diagnostics of inductively coupled RF discharge Plasma

摘要

Results of UV spectral measurements in low-pressure (30-65 Pa) and atmospheric-pressure inductively coupled radiofrequency discharges at different power inputs and gas compositions typical for that of industrial processing regimes are reported. Isolated molecular bands have been observed in the spectra; by analyzing the unresolved rotational temperature of these bands, the rotational temperature of the upper emission state can be found.