Optical Diagnostics for a High Power, RF-Inductively Coupled Plasma

摘要

Emission spectroscopy and laser-induced fluorescence have been used to monitor the field and tail-flame regions of a Hull-design inductively coupled plasma. This plasma is used for a variety of syntheses including SiC, TiC, BN, AlN and diamond. Temporally- and spatially-resolved spectra of both pure Ar and Ar/gas mixtures have been studied as a function of RF power, pressure and flow rate. Preliminary data suggest that the system is far from local thermodynamic equilibrium.