Low Resistivity C54 Phase TiSi_2 Films Synthesized by a Novel Two-Step Method

摘要

Synthesis and growth properties of the TiSi_2 film on a Si (001) substrate are investigated. A novel two-step method is user for deposition of the C54 phase TiSi_2 film wit low resistivity. The first step is the formation of the C49 phase TiSi_2 at a relative low substrate temperature of 400 ℃, followed by rapid thermal annealing process at 850 ℃ in N_2 for the formation of the C54 phase TiSi_2 as the second step. Finally, selective wet, etching is employed to remove the un-reaction Ti on the surface and the low resistivity C54 TiSi_2 film can be obtained. The films deposited under various parameters are evaluated by scanning electron microscopy, x-ray diffraction and the resistivity measurement. Compared with other sputtering technologies used commonly for TiSi_2 synthesis, this two-step method has apparent advantages such as the mild synthesis temperature and the high purity of the final product with low resistivity, uniform large area and improving surface roughness. In addition, the film also shows that the low coefficient of resistivity-temperature appears in the temperature range from 20 ℃ to 800 ℃.