Vertical Gate RF SOI LIGBT for SPICs with Significantly Improved Latch-Up Immunity

摘要

Based on the previous achievements in improving latch-up immunity of SOI LIGBT, process simulation on our proposed VG RF SOI NLIGBT was carried out with TCAD to provide a virtually fabricated device structure. Then, an approximate latching current model was derived according to the condition of minimum regenerative feedback couple between the parasitic dual-transistors. The model indicates that its latching current is a few orders higher than those before. Further verification through device simulation was done with TCAD, which proved that its weak snapback voltage in the off state is about 0.5-2.75 times higher than those breakdown voltages reported before, its breakdown voltage in the off state is about 19 V higher than its weak snapback voltage, and its latching current density in the on state is about 2-3 orders of magnitude higher than those reported before at room temperature due to hole current bypass through P~+ contact in P-well region. Therefore, it is characterized by significantly improved latch-up immunity.