Applications of the ‘CATGIXRF’ computer program to the grazing incidence X-ray fluorescence and X-ray reflectivity characterization of thin films and surfaces

摘要

Grazingincidence x-rayfluorescence (GIXRF) analysis techniquehas thepotential ofbeingoneof themostpowerfulandversatile methods for characterization of layeredmaterials, as it combines features of both x-ray reflectivity (XRR) and x-ray fluorescence techniques. GIXRF technique allows non-destructive evaluation of layer thickness, interface roughness, interlayer formation and depth profiling for an impurity element inside a layer medium or in the substrates. A computer program ‘CATGIXRF’, has been developed for GIXRF characterization of thin film and surfaces. Methodology of the program and its various features has been discussed in detail. The program offers analysis of GIXRF and XRR data simultaneously. The utility of the program has been demonstrated by example calculations and by providing a few examples of XRR and GIXRF characterization of a variety of thin-layered materials.