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Elemental depth profiling in transparent conducting oxide thin film by X-ray reflectivity and grazing incidence X-ray fluorescence combined analysis

机译：通过X射线反射率透明导电氧化物薄膜的元素深度分析和放牧入射X射线荧光组合分析

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H. Rotella; B. Caby; Y. Ménesguen; Y. Mazel; A. Valla; D. Ingerle; B. Detlefs; M.-C. Lépy; A. Novikova; G. Rodriguez; C. Streli; E. Nolot;
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1. Elemental depth profiling in transparent conducting oxide thin film by X-ray reflectivity and grazing incidence X-ray fluorescence combined analysis [J] . RoteIla H., Caby B., Menesguen Y., Spectrochimica Acta, Part B. Atomic Spectroscopy . 2017,第期

机译：X射线反射率透明导电氧化物薄膜的元素深度分析和放牧入射X射线荧光组合分析
2. Elemental depth profiling of Cu(In,Ga)Se_2 thin films by reference-free grazing incidence X-ray fluorescence analysis [J] . C. Streeck, B. Beckhoff, F. Reinhardt, Nuclear instruments and methods in physics research . 2010,第3a4期

机译：通过无参掠入射X射线荧光分析对Cu（In，Ga）Se_2薄膜进行元素深度分析
3. Combined evaluation of grazing incidence X-ray fluorescence and X-ray reflectivity data for improved profiling of ultra-shallow depth distributions [J] . D. Ingerle, F. Meirer, G. Pepponi Spectrochimica Acta, Part B. Atomic Spectroscopy . 2014,第Null期

机译：联合评估掠入射X射线荧光和X射线反射率数据，以改善超浅深度分布的轮廓
4. An Examination of Tantalum Pentoxide Thin Dielectric Films Using Grazing Incidence X-ray Reflectivity and Powder Diffraction [C] . C. H. Russell, S. M. Owens, R. D. Deslattes, International Conference on Characterization and Metrology for ULSI Technology . 2001

机译：用胶带入射X射线反射率和粉末衍射检查钽五氧化钽薄介电膜
5. Residual stress depth profiling using grazing incidence x-ray diffraction. [D] . Zhu, Xiaojing. 1995

机译：使用掠入射X射线衍射进行残余应力深度分析。
6. Combined evaluation of grazing incidence X-ray fluorescence and X-ray reflectivity data for improved profiling of ultra-shallow depth distributions [O] . D. Ingerle, F. Meirer, G. Pepponi, -1

机译：联合评估掠入射X射线荧光和X射线反射率数据以改善超浅深度分布的轮廓
7. Combined evaluation of grazing incidence X-ray fluorescence and X-ray reflectivity data for improved profiling of ultra-shallow depth distributions [O] . Ingerle D., Meirer F., Pepponi G., 2014

机译：联合评估掠入射X射线荧光和X射线反射率数据，以改善超浅深度分布的轮廓

Elemental depth profiling in transparent conducting oxide thin film by X-ray reflectivity and grazing incidence X-ray fluorescence combined analysis

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