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GDOES depth profiling analysis of the air-formed oxide film on a sputter-deposited Type 304 stainless steel

机译:溅射沉积304型不锈钢上形成的氧化膜的GDOES深度轮廓分析

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摘要

An air-formed film, similar to2 nm thick, on sputter-deposited Type 304 stainless steel has been analysed by glow discharge optical emission spectroscopy (GDOES) depth profiling. The distributions of iron, chromium, nickel and hydrogen in the film and alloy substrate have been revealed, with excellent depth resolution. The film consists of two distinct layers: an outer iron oxide layer and an inner oxide layer highly enriched with chromium oxide. Further, a thin nickel-enriched layer is evident in the alloy immediately beneath the oxide film. The implications of these findings for the structure and mechanism of growth of the film are discussed. Copyright (C) 2000 John Whey & Sons, Ltd. [References: 14]
机译:通过辉光放电光发射光谱法(GDOES)深度轮廓分析了溅射沉积的304型不锈钢上类似于2 nm厚的气膜。已经揭示了膜,合金基底中铁,铬,镍和氢的分布,具有出色的深度分辨率。该膜由两个不同的层组成:外部氧化铁层和高度富含氧化铬的内部氧化层。此外,在紧邻氧化膜下方的合金中明显可见富镍薄层。讨论了这些发现对薄膜生长的结构和机理的影响。版权所有(C)2000 John Whey&Sons,Ltd. [引用:14]

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