Silicon-based microreactors as research tools in chemistry

摘要

In this contribution suitability of silicon-technology based microreactors for performing research on reactions where temperature control is essential is discussed.The versatility of silicon micromachining technology is elucidated by describing the fabrication and performance of two types of microreactors for studying Rh-catalyzed gas phase reactions.Depending on the design of the microreactor,working temperatures up to 800 deg C can be obtained.