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Ti-Cr-B-N Coatings Prepared by Pulsed Cathodic-Arc Evaporation of Ceramic TiCrB Target produced by SHS

机译:SHS生产的陶瓷TiCrB靶的脉冲阴极电弧蒸发制备的Ti-Cr-B-N涂层

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摘要

The method of pulsed cathodic-arc evaporation of composite targets based on self-propagating high-temperature synthesis has been applied for the first time to prepare nanocomposite coatings in the Ti- Cr-B-N system. The influence of the deposition-process parameters on the coating structure and properties has been studied. Structural investigations have been carried out using X-ray diffraction analysis, transmission and scanning electron microscopy, glow-discharge optical-emission spectroscopy, and optical profilo-metry. The coating properties have been determined by nanoindentation and tribological tests. The results of the study show that the coatings mainly consist of highly dispersed fcc phase based on Ti(Cr)N in the form of crystallites 1-2 run in size; in addition, amorphous BNx phase has been found to exist in the coatings. The coatings obtained under optimal conditions have the following parameters: hardness 20-24 GPa, friction coefficient -0.6, and reduced wear about 2 ×10~6 mm~3 N~(-1)m~(-1)
机译:基于自蔓延高温合成的复合靶材的脉冲阴极电弧蒸发方法已首次应用于在Ti-Cr-B-N体系中制备纳米复合涂层。研究了沉积工艺参数对涂层结构和性能的影响。已经使用X射线衍射分析,透射和扫描电子显微镜,辉光放电光发射光谱法和光学轮廓分析法进行了结构研究。涂层性能已通过纳米压痕和摩擦学测试确定。研究结果表明,该涂层主要由高度分散的基于Ti(Cr)N的fcc相组成,晶粒尺寸为1-2微米。另外,发现在涂层中存在无定形的BNx相。在最佳条件下获得的涂层具有以下参数:硬度20-24 GPa,摩擦系数-0.6,降低的磨损约2×10〜6 mm〜3 N〜(-1)m〜(-1)

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