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Arc evaporation of metal, intermetallic and ceramic target materials in order to prepare coatings al - cr - n

机译:金属,金属间化合物和陶瓷靶材的电弧蒸发以制备涂层al-cr-n

摘要

The present invention relates to arc evaporation technique by means of targets produced by powder metallurgy, in which the components are present as an intermetallic compounds. For the production by fusion, a powder is used which contains an intermetallic compound.
机译:本发明涉及借助于粉末冶金生产的靶的电弧蒸发技术,其中组分作为金属间化合物存在。为了通过熔融生产,使用包含金属间化合物的粉末。

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