Achieving Fast and Reliable TEM-Sample Lift-out and Transfer Using Novel Materials and Novel in-situ Tools

摘要

Combining various tools and materials yields a novel, quick, reliable and clean way of transferring TEM samples to TEM grids for further analysis. The whole process can be sped up even more by mounting a small CCD camera to the tool, yielding a side view of the sample and the approaching gripper/tip. This setup gives 3D information on the relative positions of sample, grid and gripper allowing safe and quick manipulation.