首页> 外文期刊>Proceedings of the Institution of Mechanical Engineers, Part B. Journal of engineering manufacture >Comparison of chemical vapor deposition diamond-, diamond-like carbon- and TiAlN-coated microdrills in graphite machining
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Comparison of chemical vapor deposition diamond-, diamond-like carbon- and TiAlN-coated microdrills in graphite machining

机译:石墨加工中化学气相沉积金刚石,类金刚石碳和TiAlN涂层微钻的比较

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摘要

In this study, continuous microcrystalline diamond layer with grain size of 0.8-2 μm, nanocrystalline diamond layer with grain size less than 100nm, diamond-like carbon layer with no apparent grains and TiAlN layer with small particles on the top surface are successfully deposited on cemented tungsten carbide-cobalt (WC-Co) samples and microdrills. Diamond peak of microcrystalline diamond film is quite definite in the Raman spectrum, while that of nanocrystalline diamond and diamond-like carbon coating is not so apparent. The roughness of microcrystalline diamond, nanocrystalline diamond, diamond-like carbon coating and TiAlN coatings is about 215.83, 144.4, 23.63 and 168.17nm, respectively. Nanocrystalline diamond film exhibits lowest adhesive strength between substrate, while diamond-like carbon exhibits highest adhesive strength between substrate. Tribotests show stable friction coefficients of microcrystalline diamond, nanocrystalline diamond, diamond-like carbon and TiAlN coatings as about 0.28, 0.08, 0.08 and 0.4, respectively, while their wear rates against Si_3N_4 balls are 4.9E-7, 7.0E-7, 7.7E-7 and 2.9E-6mm~3 N~(-1) m~(-1), respectively. Microdrilling experiments show that the tool life of microcrystalline diamond-coated microdrill is as about 1.5, 2, 6 and 9 times more than that of nanocrystalline diamond-, diamond-like carbon-, TiAlN-coated and uncoated microdrills, respectively. The main wear types of these microdrills are flank wear, chipping and coating delamination. The results show that the microcrystalline diamond film is more suitable to be deposited on microdrills than the other three coatings to enhance cutting performance of microdrills in dry machining of graphite.
机译:在这项研究中,成功​​地在其上沉积了晶粒尺寸为0.8-2μm的连续微晶金刚石层,晶粒尺寸小于100nm的纳米晶金刚石层,无表观晶粒的类金刚石碳层和具有小颗粒的TiAlN层。硬质合金-碳化钴(WC-Co)样品和微钻。在拉曼光谱中,微晶金刚石膜的金刚石峰相当确定,而纳米晶金刚石和类金刚石碳涂层的金刚石峰则不太明显。微晶金刚石,纳米晶金刚石,类金刚石碳涂层和TiAlN涂层的粗糙度分别为约215.83、144.4、23.63和168.17nm。纳米晶金刚石膜在基材之间表现出最低的粘合强度,而类金刚石碳在基材之间表现出最高的粘合强度。摩擦试验表明,微晶金刚石,纳米晶金刚石,类金刚石碳和TiAlN涂层的稳定摩擦系数分别约为0.28、0.08、0.08和0.4,而它们对Si_3N_4球的磨损率为4.9E-7、7.0E-7、7.7 E-7和2.9E-6mm〜3 N〜(-1)m〜(-1)。微钻实验表明,微晶金刚石涂层微钻的刀具寿命分别是纳米晶金刚石,类金刚石碳涂层,TiAlN涂层和无涂层微钻的刀具寿命的约1.5倍,2倍,6倍和9倍。这些微钻的主要磨损类型是侧面磨损,碎裂和涂层分层。结果表明,与其他三种涂层相比,微晶金刚石薄膜更适合沉积在微钻上,以增强微钻在石墨干法加工中的切削性能。

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