Surface profile measurement of a sinusoidal grid using an atomic force microscope on a diamond turning machine

摘要

This paper describes the surface profile measurement of a XY-grid workpiece with sinusoidal microstructures using an atomic force microscope (AFM) on a diamond turning machine. The sinusoidal micro-structures, which are fabricated on an aluminum plate by fast tool servo-assisted diamond turning, are a superposition of periodic sine-waves along the X- and F-directions (wavelength (XY): 150 μm, amplitude (Z): 0.25 μm). A linear encoder with a resolution of 0.5 nm is integrated into the AFM-head for accurate measurement of the Z-directional profile height in the presence of noise associated with the diamond turning machine. The spindle and the X-slide of the machine are employed to spirally scan the AFM-head over the sinusoidal grid workpiece. Experiments fabricating and measuring the sinusoidal grid workpiece are carried out after accurate alignment of the AFM cantilever tip with the spindle centerline.