A comparative study on the microstructure and tribological properties of Si_3N_4 and TiN films produced by the IBED method

摘要

The tribological properties of Si_3N_4 and TiN thin films produced by ion beam enhanced deposition (IBED) were compared on a SRV friction and wear testing machine. The friction coefficient of all thin films shows a descending tendency with increase in load, and is lower than that of 52100 steel. All the IBED films show a much better wear resistance than 52100 steel, especially in the higher load and frequency ranges; it can reach six times that of the latter. In order to understand the reasons for their excellent properties, the microstructure, microhardness and bonding strength with the substrate were analysed by SEM, X-ray diffraction, Knoop hardness and scratching test methods separately. The results show that the TiN(1) film exhibits the best tribological properties, which are closely related with its greater hardness and bonding strength.