Effects of fluorine doping on structural, optical and electrical properties of spray deposited CdO thin films

摘要

Fluorine doped cadmium oxide (CdO:F) thin films were deposited onto glass substrates by spray deposition technique. Fluorine concentration dependent structural, optical and electrical properties of the films are reported. X-ray diffraction study confirms the growth of polycrystalline cubic CdO films. Optical absorption analysis of the films shows increase of optical band gap energy from 2.45 to 2.65 eV for the increase of fluorine concentration. The transparency of the films is found to be > 80% and also it is increased with the fluorine concentration. Hall-Effect measurement of the films shows resistivity change between 2.5 × 10 ~4 and 4.5 × 10 ~4 Ω cm and carrier concentration in the range of 4 × 10~(15) cm~(-3) to 7 × cm ~3 depending on doping concentration. Photoresponse study of the fabricated CdO:F/p-Si heterostructure diode is also studied and reported.