Simulation-based Design of Quartz Resonator for Bionic Olfactory Sensor

摘要

In this paper, we report a bionic olfactory sensor that could be applied for breast cancer detection. This paper mainly focuses on describing the basic principle of the bionic olfactory sensor and introducing the simulation-based design of the sensor. We use an original anisotropic quartz etching simulation system to simulate the etching process of the key parts of the resonator, and thus obtain the key parameters of the quartz etching process of the resonator, so as to control the production accuracy of the quartz resonator and improve the performance of the bionic olfactory sensor.