SC cut quartz resonator, method of manufacturing the same, piezoelectric sensor using the SC cut quartz resonator, and manufacturing method thereof.

摘要

PROBLEM TO BE SOLVED: To provide a SC-cut crystal oscillator oscillating even in the liquid phase, and a method of manufacturing the same, and to provide a piezoelectric sensor using this oscillator and a method of manufacturing the same.SOLUTION: A SC-cut crystal piece is polished into a one side convex lens shape, the plane side corner is beveled, the entire surface is mirror finished, and after reducing the equivalent resistance value as small as possible, an electrode is fixed thus obtaining a SC-cut crystal oscillator 4. One end of the SC-cut crystal oscillator 4 is fixed to a substrate 5 by a conductive adhesive 15, the outer periphery is covered with a waterproof member 17, and one electrode surface is sealed airtightly and brought into dry state. A through-hole 18 is provided in the waterproof member 17, the other electrode surface (measurement surface) is exposed, and then liquid drops of a measurement sample are dripped from the through-hole 18 onto the measurement surface, so that it can be used as a piezoelectric sensor.SELECTED DRAWING: Figure 5b