Manufacturing by chemical etching process for the super-thin grooved-type AT-cut quartz crystal resonators, and the resonance frequency characteristics

摘要

We have aimed at the development of the high frequency super-thin grooved (inverse mesa-type) AT-cut quartz crystal resonators with excellent frequency temperature characteristics that act gently for ecology. In this paper, we represent both the precision manufacturing by chemical etching process and the resonance frequency characteristics for the AT-cut grooved-type quartz crystal resonators.