Humidity frequency characteristics of the AT-cut quartz crystal resonator with the ZnO thin film

摘要

We've aimed at the high stability AT-Cut quartz crystal resonator humidity sensor that acts gently for ecology and has high stability for temperature frequency characteristics. In this paper; we prepared the ZnO thin film on the AT-Cut quartz crystal resonator by sputter deposition. The ZnO is also gentle for ecology, chemically stable and have variable functions, further interesting devices that have been expected the utility on variable crystal state from single crystal state to amorphous state. We have researched the temperature frequency characteristics, the humidity frequency characteristics and the series resistance equivalent circuit constant R1. We confirmed the effect of the ZnO thin film.