A Programmable 0.18-$muhbox{m}$ CMOS Electrochemical Sensor Microarray for Biomolecular Detection

摘要

A configurable electrochemical sensor microarray system-on-a-chip fabricated in a standard digital 0.18-mum complementary metal-oxide-semiconductor (CMOS) process is presented. Each pixel within this 5times10 array occupies a 160 mumtimes120 mum area and contains a differential electrochemical transducer with a programmable sensor. The sensor has a digitally configurable topology capable of performing different electroanalytical measurements for a variety of affinity-based biomolecular sensing applications. The main modes of operation for this system are impedance spectroscopy, voltammetry, potentiometry, and field-effect sensing