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Comparison of gain in group-III-nitride laser structures grown by metalorganic vapour phase epitaxy and plasma-assisted molecular beam epitaxy on bulk GaN substrates

机译:金属有机气相外延和等离子体辅助分子束外延在块状GaN衬底上生长的III族氮化物激光结构的增益比较

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摘要

Light amplification features of similar group-III-nitride laser structures grown by metal organic vapour phase epitaxy (MOVPE) and plasma-assisted molecular beam epitaxy (PAMBE) as alternative techniques were investigated. The samples are characterized by very low dislocation density (10~5 cm~(-2)) that results from the use of high-pressure-grown GaN substrates. Gain measurements were carried out by means of the variable stripe length method. A maximum excitation power of 464 kW cm~(-2) corresponds to a peak modal gain value of 180 cm~(-1) for the MOVPE-grown sample and 315 cm~(-1) for the PAMBE-grown one. Saturation lengths of 350 μm and 250 μm measured for MOVPE- and PAMBE-grown samples, respectively, indicate reduced nonradiative recombination compared to heteroepitaxy on foreign substrates. Activation energies associated with InGaN band profile fluctuations derived from temperature-dependent photoluminescence measurements yield values of 41 meV and 22 meV for MOVPE and PAMBE, respectively. Improved band profile smoothness is accompanied by a reduced threshold for stimulated emission in favour of the PAMBE-grown laser.
机译:研究了金属有机气相外延(MOVPE)和等离子体辅助分子束外延(PAMBE)作为替代技术生长的类似III族氮化物激光结构的光放大特性。样品的特征是由于使用高压生长的GaN衬底而导致的极低的位错密度(10〜5 cm〜(-2))。增益测量是通过可变条带长度方法进行的。 464 kW cm〜(-2)的最大激励功率对应于MOVPE生长样品的峰值模态增益值为180 cm〜(-1),而PAMBE生长样品的峰值模态增益值为315 cm〜(-1)。 MOVPE和PAMBE生长样品的饱和长度分别为350μm和250μm,这表明与异质外源底物相比,非辐射重组减少。与InGaN能谱分布波动相关的活化能来自于与温度有关的光致发光测量值,MOVPE和PAMBE的值分别为41 meV和22 meV。改进的带状轮廓平滑度伴随着受激发射阈值的降低,有利于PAMBE种植的激光器。

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