High-performance N-polar GaN enhancement-mode device technology

摘要

In this paper, we report the recent progress in the high-frequency performance of enhancement-mode devices in the novel N-polar GaN technology and provide a pathway for further scaling. The intrinsic advantages of electron confinement, polarization doping of the back-barrier and the absence of a source barrier in N-polar GaN technology were leveraged with polarization engineering with a top barrier for enhancement mode operation and advanced self-aligned source/drain technology for low parasitic access resistances. The scalability of the device structures are explored in terms of short-channel effects and high-frequency performance. Low-field electron mobility in vertically scaled channel was also investigated providing insights on the scattering mechanism.