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Impact of deposition temperature on the properties of SnS thin films grown over silicon substrate-comparative study of structural and optical properties with films grown on glass substrates

机译:沉积温度对在硅基板上生长的SnS薄膜性能的影响-与在玻璃基板上生长的膜的结构和光学性质的比较研究

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摘要

Tin sulfide (SnS) thin films were chemically deposited over silicon substrate in a temperature range of 250 degrees C-400 degrees C. The effects of deposition temperature on the structural, morphological and optical properties of the films were evaluated. All films present an orthorhombic SnS structure with a preferred orientation along (040). High absorption coefficients (in the range of 105 cm(-1)) were found for all obtained films with an increase in a value when deposition temperature decreases. Furthermore, the effects of substrate type were investigated based on comparison between the present results and those obtained for SnS films grown under the same deposition conditions but over glass substrate. The results suggest that the formation of SnS films onto glass substrate is faster than onto silicon substrate. It is found that the substrate nature affects the orientation growth of the films and that SnS films deposited onto Si present more defects than those deposited onto glass substrate. The optical transmittance is also restricted by the substrate type, mostly below 1000 nm. The obtained results for SnS films onto silicon suggest their promising integration within optoelectronic devices.
机译:硫化锡(SnS)薄膜在250摄氏度至400摄氏度的温度范围内化学沉积在硅基板上。评估了沉积温度对薄膜结构,形态和光学性质的影响。所有的薄膜都呈现出具有正交取向的SnSS结构,并沿(040)方向具有较好的取向。对于所有获得的薄膜,发现高吸收系数(在105 cm(-1)范围内),当沉积温度降低时,吸收系数的值会增加。此外,根据本研究结果与在相同沉积条件下但在玻璃基板上生长的SnS膜获得的结果之间的比较,研究了基板类型的影响。结果表明,在玻璃基板上形成SnS膜比在硅基板上形成SnS膜要快。发现衬底性质影响膜的取向生长,并且沉积到Si上的SnS膜比沉积到玻璃衬底上的那些具有更多的缺陷。透光率也受基材类型的限制,通常低于1000 nm。 SnS膜在硅片上获得的结果表明它们在光电子器件中的应用前景看好。

著录项

  • 来源
    《Semiconductor science and technology》 |2017年第11期|115005.1-115005.9|共9页
  • 作者单位

    Univ Tunis El Manar, Lab Analyt Chem & Electrochem, Fac Sci, Tunis 2092, Tunisia|Univ Rovira & Virgili, Dept Elect Elect & Automat Engn, E-43007 Tarragona, Spain;

    Univ Tunis El Manar, Lab Analyt Chem & Electrochem, Fac Sci, Tunis 2092, Tunisia;

    Univ Rovira & Virgili, Dept Elect Elect & Automat Engn, E-43007 Tarragona, Spain;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    SnS thin films; silicon substrates; CVD; XRD; optical properties;

    机译:SnS薄膜;硅衬底;CVD;XRD;光学性能;
  • 入库时间 2022-08-18 01:29:46

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